Semiconductor Processing



The Begbroke Cleanroom provides 150m2 of class 10,000 space housing a wide range of newly purchased processing equipment. Facilities include:

  • 18m2 yellow area for photolithography including a mask aligner capable of processing substrates up to 6inches.
  • Thermal and e-beam evaporators.
  • Reactive ion etching and PECVD.
  • Rapid thermal annealer.
  • A Keithly Instruments based measurement and testing suite.

Contact Professor Sebastian Bonilla. Also see the Cleanroom Website.