Semiconductor Processing

clean

Cleanroom

The Begbroke Cleanroom provides 150m2 of class 10,000 space housing a wide range of newly purchased processing equipment. Facilities include:

  • 18m2 yellow area for photolithography including a mask aligner capable of processing substrates up to 6inches.
  • Thermal and e-beam evaporators.
  • Reactive ion etching and PECVD.
  • Rapid thermal annealer.
  • A Keithly Instruments based measurement and testing suite.

Contact Dr Peter Wilshaw. Also see the Cleanroom Website.

www.materials.ox.ac.uk//research/industry/iimm/processing/semiconductor.html
15/10/2019 22:41:35
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