Semiconductor Processing

Cleanroom

The Begbroke Cleanroom provides 150m² of class 10,000 space housing a wide range of newly purchased processing equipment. Facilities include:

18m² yellow area for photolithography including a mask aligner capable of processing substrates up to 6inches.
Thermal and e-beam evaporators.
Reactive ion etching and PECVD.
Rapid thermal annealer.
A Keithly Instruments based measurement and testing suite.