Enhanced light collection from solid-state qubits in silicon carbide through grayscale hard-mask lithography

Bekker C, Jones A, Cheng X, Salter P, Smith J, Arshad MJ, Cilibrizzi P, Lomax P, Wood GS, Cheung R, Knolle W, Ross N
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A scalable, shape-controllable method for nanofabrication of high-aspect-ratio microlenses in silicon carbide is presented. Light collection from these lenses is investigated, and an enhancement in collection efficiency of a factor 4.4±1.0 is demonstrated.