COMBINED APPLICATION OF SEM-CL AND SEM-EBIC FOR THE INVESTIGATION OF COMPOUND SEMICONDUCTORS

SCHREIBER J, HERGERT W
1989
Conference paper
Volume:
104
,
pp.
97 - 107
No abstract available
Keywords:

GAAS

,

PARAMETERS

,

SCANNING ELECTRON-MICROSCOPE

,

BEAM-INDUCED CURRENT

,

BAND-GAP SEMICONDUCTORS

,

CATHODOLUMINESCENCE MEASUREMENTS

,

RECOMBINATION RADIATION