Young's modulus and residual stress of GeSbTe phase-change thin films

Nazeer H, Bhaskaran H, Woldering LA, Abelmann L
October 2015
Journal article
Journal:
Thin Solid Films
Volume:
592
,
Elsevier
,
pp.
69 - 75
No abstract available
Keywords:
40 Engineering
DOI
10.1016/j.tsf.2015.08.049