BixTey thermoelectric thin films sputtered at room temperature onto moving polymer web

We are investigating the development of a high-throughput manufacturing method for flexible thermoelectric generators.  Such devices are of interest for generating small amounts of power needed to drive flexible devices such as on-skin patches.  Sputtering is used to deposit, at room temperature, Bi_xTe_y thermoelectric thin films on a moving flexible 'web' of polymer film such as would be used for roll-to-roll manufacture.  This report in Thin Solid Films examines the effect of sputtering pressure on the deposited films, and on their thermoelectric properties.