BixTey thermoelectric thin films sputtered at room temperature onto moving polymer web

Graph film properties versus argon flow rate

Thermoelectric power factor versus argon flow rate with images of deposited BiTe film

We are investigating the development of a high-throughput manufacturing method for flexible thermoelectric generators.  Such devices are of interest for generating small amounts of power needed to drive flexible devices such as on-skin patches.  Sputtering is used to deposit, at room temperature, BixTey thermoelectric thin films on a moving flexible 'web' of polymer film such as would be used for roll-to-roll manufacture.  This report in Thin Solid Films examines the effect of sputtering pressure on the deposited films, and on their thermoelectric properties.