The production and performance of inversion layer silicon solar cells is investigated in this paper published by IPSS.
An ion-injection technique is used to obtain highly charged dielectric nanolayers. Charge concentrations as high as 2 x 1013 cm-2 is demonstrated, which could lead to an efficiency of 24.8% on 10 Ω cm silicon.
Better performance is expected with enhanced passivation, higher charge densities, and optimal negative charge at rear dielectric.