A pure and well crystalized yttrium doped hafnium oxide Hf0.69Y0.31O2-δ (YSH) is obtained by using a modified solid state reaction method, where a water-based milling medium and freeze drying are implemented to reduce the agglomeration. The mean sizes of the YSH powder, which is obtained through a traditional alcohol-based milling method, is more than 1 um. However, the powder size can be reduced to 100 nm by using the water-based milling method. In addition, the calcination temperature can be lowered 200 °C to get a pure phase by using the water-based milling method, compared to the alcohol-based milling method. The relative density of YSH ceramic materials can reach to 97.5% by conventional sintering at 1650 °C after during 10 h.
