Ultra-thin SiOx/AIOx/SiNx layers and electric fields in heat treatment

In this paper*, the authors show that applying electric field during heat treatment can significantly improve passivation in silicon solar cells using ultra-thin SiOx/AIOx/SiNx layers.

By introducing surface charge with corona discharge, the authors reduced energy loss from charge combination, achieving excellent performance.  The improvement is linked to hydrogen movement and charge effects at the interface, with AIOx playing a key role despite lower hydrogen content than SiNx.

This method offers a practical way to boost efficiency in advanced solar cells like TOPCon, without adding complexity or cost.

* 'Silicon interface properties of AIOx and SiNx passivation nanolayers under electric field stress', published in APL Electronic Devices.